ESCORT SM 요약정보 및 구매

상품 정보

SOL instruments has many years' experience in development and production of optical monitoring

systems for various technological processes.

OEM spectrophotometer ESCORT SM is a high-end instrument based on innovative investigations

of spectral devices and precise measuring systems, with no analogs on the market.

OEM spectrophotometer ESCORT SM provides precise and rapid measurements of emission

(E) spectrum of evaporated material, transmission (T) or reflected (R) spectra of deposited coating,

the automatic control and optimization of deposition process (Control&Optimization System).

fig1 ESCORT 435x315

ESCORT SM spectrophotometer is a specialized OEM complex that measures optical coating parameters in the process of deposition and after the process, in the vacuum sputtering chambers of various types.
ESCORT SM spectrophotometer has measuring channel of broadband monitoring (S125) and measuring channel of single wavelength monitoring (M450)
ESCORT SM spectrophotometer enables to measure transmittance (T) or reflectance (R) simultaneously through two measuring channels and displays these coating parameters for automatic deposition process control.
The measuring channel of broadband monitoring allows simultaneous measurement of a spectrum for all wavelength ranges. The measuring channel of single wavelength monitoring measures coating parameters at the selected wavelength precisely and synchronously with the broadband channel.
The single wavelength channel allows precise spectrum measurements after the deposition process by scanning in the defined spectral range with the set step.

shema propuskanie eng

Measurements of emission, transmission and reflection spectra
Measurements of emission value, transmittance, optical density value and reflectance at fixed wavelength
Kinetic measurements at selected wavelength
Statistical characteristics calculation

Features

Monochromatic and broadband optical monitoring with two independent measuring channels: broadband (BBOM) and single wavelength (SWOM)
High performance original optical schemes
3,5" embedded personal computer that performs rapid processing of the measurement results and data transferring to the external software that controls a vacuum chamber
Embedded color TFT-LCD Touch Screen module based on 3,5" PC or РС104 and internal software for stand-alone operation. External computer connection through high-speed interface 10/100 Ethernet, connection to a company's local network

Characteristics	Specifications
ESCORT SM	channel S125	channel М450
Spectral device:	spectrograph	monochromator with double dispersion
Focal length:	125 mm	450 mm (225 x 2)
Spectral range:	from 380 to 1100 nm	from 380 to 850 nm
Spectral slit:	fixed slit,	adjustable,
Spectral slit:	width 0.04 mm	width from 0.2 to 2 mm
Spectral interval:	from 1.35 to 3.4 nm	from 0.3 to 3 nm
Minimal period of spectral measurement:	2 ms / spectrum	2 ms / point
Minimal step of spectral scanning:	0.37 nm / pixel	0.1 nm
Absolute error of wavelength setting:	± 0.4 nm	± 0.2 nm
Reproducibility of wavelength setting:	± 0.2 nm	± 0.1 nm
Stray light:	0.1 % (at λ=450 nm)	0.005 % (at λ=400 nm)
Photometric noise:	0.07%	0.02%
Photometric accuracy:	± 0.5 %	± 0.2 %
Photometric reproducibility	± 0.15 %	± 0.05 %
(convergence, repeatability):	± 0.15 %	± 0.05 %
Emission detectors:	CCD	PMT
Emission spectrum measuring option:	yes	no
Emission input into the spectral device:	optical fiber	optical fiber
Synchronization type:	internal; external	internal; external
Ports for additional external devices:	Ethernet, USB, RS 232,	Ethernet, USB, RS 232,
Ports for additional external devices:	VGA, PS/2	VGA, PS/2
Dimensions:	483 x 600 x 177 mm	483 x 600 x 177 mm
Weight:	25 kg	25 kg
Power consumption:	230 V, 50 Hz, 200 V?А	230 V, 50 Hz, 200 V?А

품명	ESCORT SM
모델명	ESCORT SM
법에 의한 인증·허가 등을 받았음을 확인할 수 있는 경우 그에 대한 사항	상품페이지 참고
제조국 또는 원산지	Belarus
제조자	SOL instruments Ltd.
A/S 책임자와 전화번호 또는 소비자상담 관련 전화번호	02-355-5963